Using a PLD BN/AlN composite as an annealing cap for ion implanted SiC.
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| Title: | Using a PLD BN/AlN composite as an annealing cap for ion implanted SiC. |
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| Authors: | Ruppalt, L. B., Stafford, S., Yuan, D. |
| Source: | Solid-State Electronics; February 2003, Vol. 47 Issue 2, p253-257, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00381101 |
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| DOI: | 10.1016/S0038-1101(02)00203-4 |
