A Pendulous Oscillating Gyroscopic Accelerometer Fabricated Using Deep-Reactive Ion Etching.
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| Title: | A Pendulous Oscillating Gyroscopic Accelerometer Fabricated Using Deep-Reactive Ion Etching. |
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| Authors: | Kaiser, Todd J., Allen, Mark G. |
| Source: | Journal of Microelectromechanical Systems; February 2003, Vol. 12 Issue 1, p21-28, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2002.807476 |
