APA (7th ed.) Citation

Kaiser, T. J., & Allen, M. G. (2003). A Pendulous Oscillating Gyroscopic Accelerometer Fabricated Using Deep-Reactive Ion Etching. Journal of Microelectromechanical Systems, 12(1), 21. https://doi.org/10.1109/JMEMS.2002.807476

Chicago Style (17th ed.) Citation

Kaiser, Todd J., and Mark G. Allen. "A Pendulous Oscillating Gyroscopic Accelerometer Fabricated Using Deep-Reactive Ion Etching." Journal of Microelectromechanical Systems 12, no. 1 (2003): 21. https://doi.org/10.1109/JMEMS.2002.807476.

MLA (9th ed.) Citation

Kaiser, Todd J., and Mark G. Allen. "A Pendulous Oscillating Gyroscopic Accelerometer Fabricated Using Deep-Reactive Ion Etching." Journal of Microelectromechanical Systems, vol. 12, no. 1, 2003, p. 21, https://doi.org/10.1109/JMEMS.2002.807476.

Warning: These citations may not always be 100% accurate.