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A Pendulous Oscillating Gyroscopic Accelerometer Fabricated Using Deep-Reactive Ion Etching.

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Bibliographic Details
Title: A Pendulous Oscillating Gyroscopic Accelerometer Fabricated Using Deep-Reactive Ion Etching.
Authors: Kaiser, Todd J., Allen, Mark G.
Source: Journal of Microelectromechanical Systems; February 2003, Vol. 12 Issue 1, p21-28, 8p
Database: Applied Science & Technology Source
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