A 22-nm Damascene-Gate MOSFET Fabrication With 0.9-nm EOT and Local Channel Implantation.
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| Title: | A 22-nm Damascene-Gate MOSFET Fabrication With 0.9-nm EOT and Local Channel Implantation. |
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| Authors: | Choe, Jeong-Dong, Lee, Chang-Sub, Kim, Sung-Ho |
| Source: | IEEE Electron Device Letters; March 2003, Vol. 24 Issue 3, p195-197, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07413106 |
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| DOI: | 10.1109/LED.2003.811401 |
