Self-organized pore formation and open-loop control in semiconductor etching.

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Bibliographic Details
Title:	Self-organized pore formation and open-loop control in semiconductor etching.
Authors:	Claussen, Jens Christian, Carstensen, Jürgen, Christophersen, Marc
Source:	Chaos; March 2003, Vol. 13 Issue 1, p217-224, 8p
Database:	Applied Science & Technology Source

Description
ISSN:	10541500
DOI:	10.1063/1.1497835