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Self-organized pore formation and open-loop control in semiconductor etching.

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Bibliographic Details
Title: Self-organized pore formation and open-loop control in semiconductor etching.
Authors: Claussen, Jens Christian, Carstensen, Jürgen, Christophersen, Marc
Source: Chaos; March 2003, Vol. 13 Issue 1, p217-224, 8p
Database: Applied Science & Technology Source
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DbLabel: Applied Science & Technology Source
An: 501007547
AccessLevel: 2
PubType: Academic Journal
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  Data: Self-organized pore formation and open-loop control in semiconductor etching.
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501007547
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        Value: 10.1063/1.1497835
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        Text: English
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        PageCount: 8
        StartPage: 217
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      – TitleFull: Self-organized pore formation and open-loop control in semiconductor etching.
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            NameFull: Claussen, Jens Christian
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            NameFull: Carstensen, Jürgen
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              Text: March 2003
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              Y: 2003
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