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A complex x-ray characterization of epitaxially grown high-K gate dielectrics.

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Bibliographic Details
Title: A complex x-ray characterization of epitaxially grown high-K gate dielectrics.
Authors: Zaumseil, P., Schroeder, T.
Source: Journal of Physics: D Applied Physics; May 21 2005, Vol. 38, pA179-A183, 5p
Database: Applied Science & Technology Source
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