Degradation mechanism of lightly doped drain (LDD) n-channel MOSFET's studied by ultraviolet light irradiation.
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| Title: | Degradation mechanism of lightly doped drain (LDD) n-channel MOSFET's studied by ultraviolet light irradiation. |
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| Authors: | Saitoh, M., Shibata, H., Momose, H. |
| Source: | Journal of the Electrochemical Society; October 1985, Vol. 132, p2463-2466, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2113600 |
