Formation of cobalt silicides as a buried layer in silicon using high energy heavy ion irradiation.
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| Title: | Formation of cobalt silicides as a buried layer in silicon using high energy heavy ion irradiation. |
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| Authors: | Chakraborty, B. R., Halder, S. K., Karar, N. |
| Source: | Journal of Physics: D Applied Physics; August 21 2005, Vol. 38 Issue 16, p2836-2840, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00223727 |
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| DOI: | 10.1088/0022-3727/38/16/015 |
