Fast fabrication of silicon based microstructures using 355 nm UV laser.

Saved in:

Bibliographic Details
Title:	Fast fabrication of silicon based microstructures using 355 nm UV laser.
Authors:	Pan, C. T., Hwang, Y. M., Hsieh, C. W.
Source:	Materials Science & Technology; November 2005, Vol. 21 Issue 11, p1344-1348, 5p
Database:	Applied Science & Technology Source

Description
ISSN:	02670836
DOI:	10.1179/174328405X46141