Fast fabrication of silicon based microstructures using 355 nm UV laser.
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| Title: | Fast fabrication of silicon based microstructures using 355 nm UV laser. |
|---|---|
| Authors: | Pan, C. T., Hwang, Y. M., Hsieh, C. W. |
| Source: | Materials Science & Technology; November 2005, Vol. 21 Issue 11, p1344-1348, 5p |
| Database: | Applied Science & Technology Source |
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