Time-dependent two-temperature chemically non-equilibrium modelling of high-power Ar-N2 pulse-modulated inductively coupled plasmas at atmospheric pressure.
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| Title: | Time-dependent two-temperature chemically non-equilibrium modelling of high-power Ar-N2 pulse-modulated inductively coupled plasmas at atmospheric pressure. |
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| Authors: | Tanaka, Yasunori |
| Source: | Journal of Physics: D Applied Physics; January 21 2006, Vol. 39 Issue 2, p307-319, 13p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00223727 |
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| DOI: | 10.1088/0022-3727/39/2/011 |