Magnetic Induction Micromachine—Part II: Fabrication and Testing.
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| Title: | Magnetic Induction Micromachine—Part II: Fabrication and Testing. |
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| Authors: | Cros, Florent, Koser, Hur, Allen, Mark G. |
| Source: | Journal of Microelectromechanical Systems; April 2006, Vol. 15 Issue 2, p427-439, 13p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2006.872239 |
