Magnetic Induction Micromachine—Part II: Fabrication and Testing.

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Bibliographic Details
Title: Magnetic Induction Micromachine—Part II: Fabrication and Testing.
Authors: Cros, Florent, Koser, Hur, Allen, Mark G.
Source: Journal of Microelectromechanical Systems; April 2006, Vol. 15 Issue 2, p427-439, 13p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501244614
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Magnetic Induction Micromachine—Part II: Fabrication and Testing.
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1109/JMEMS.2006.872239
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      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 427
    Titles:
      – TitleFull: Magnetic Induction Micromachine—Part II: Fabrication and Testing.
        Type: main
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          Name:
            NameFull: Cros, Florent
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            NameFull: Koser, Hur
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            NameFull: Allen, Mark G.
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              M: 04
              Text: April 2006
              Type: published
              Y: 2006
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              Value: 15
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            – TitleFull: Journal of Microelectromechanical Systems
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