Real-Time In Situ Tracking of Gas-Phase Carbon-to-Silicon Ratio During Hot-Wall CVD Growth of SiC.

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Bibliographic Details
Title:	Real-Time In Situ Tracking of Gas-Phase Carbon-to-Silicon Ratio During Hot-Wall CVD Growth of SiC.
Authors:	Vanmil, B. L., Lew, K. K., Myers-Ward, R. L.
Source:	Journal of Electronic Materials; May 2008, Vol. 37 Issue 5, p685-690, 6p
Database:	Applied Science & Technology Source

Description
ISSN:	03615235
DOI:	10.1007/s11664-007-0306-2