APA (7th ed.) Citation

Vanmil, B. L., Lew, K. K., & Myers-Ward, R. L. (2008). Real-Time In Situ Tracking of Gas-Phase Carbon-to-Silicon Ratio During Hot-Wall CVD Growth of SiC. Journal of Electronic Materials, 37(5), 685. https://doi.org/10.1007/s11664-007-0306-2

Chicago Style (17th ed.) Citation

Vanmil, B. L., K. K. Lew, and R. L. Myers-Ward. "Real-Time In Situ Tracking of Gas-Phase Carbon-to-Silicon Ratio During Hot-Wall CVD Growth of SiC." Journal of Electronic Materials 37, no. 5 (2008): 685. https://doi.org/10.1007/s11664-007-0306-2.

MLA (9th ed.) Citation

Vanmil, B. L., et al. "Real-Time In Situ Tracking of Gas-Phase Carbon-to-Silicon Ratio During Hot-Wall CVD Growth of SiC." Journal of Electronic Materials, vol. 37, no. 5, 2008, p. 685, https://doi.org/10.1007/s11664-007-0306-2.