Real-Time In Situ Tracking of Gas-Phase Carbon-to-Silicon Ratio During Hot-Wall CVD Growth of SiC.
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| Title: | Real-Time In Situ Tracking of Gas-Phase Carbon-to-Silicon Ratio During Hot-Wall CVD Growth of SiC. |
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| Authors: | Vanmil, B. L., Lew, K. K., Myers-Ward, R. L. |
| Source: | Journal of Electronic Materials; May 2008, Vol. 37 Issue 5, p685-690, 6p |
| Database: | Applied Science & Technology Source |
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