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Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams.

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Bibliographic Details
Title: Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams.
Authors: Tanaka, M., Chu, F., Shimojo, M.
Source: Journal of Materials Science; May 2006, Vol. 41 Issue 9, p2667-2671, 5p
Database: Applied Science & Technology Source
Description
ISSN:00222461
DOI:10.1007/s10853-006-7868-x