APA (7th ed.) Citation

Tanaka, M., Chu, F., & Shimojo, M. (2006). Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams. Journal of Materials Science, 41(9), 2667. https://doi.org/10.1007/s10853-006-7868-x

Chicago Style (17th ed.) Citation

Tanaka, M., F. Chu, and M. Shimojo. "Formation of Iron Silicide Nano-islands on Si Substrates by Metal Organic Chemical Vapor Deposition Under Electron Beams." Journal of Materials Science 41, no. 9 (2006): 2667. https://doi.org/10.1007/s10853-006-7868-x.

MLA (9th ed.) Citation

Tanaka, M., et al. "Formation of Iron Silicide Nano-islands on Si Substrates by Metal Organic Chemical Vapor Deposition Under Electron Beams." Journal of Materials Science, vol. 41, no. 9, 2006, p. 2667, https://doi.org/10.1007/s10853-006-7868-x.