Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams.
Saved in:
| Title: | Formation of iron silicide nano-islands on Si substrates by metal organic chemical vapor deposition under electron beams. |
|---|---|
| Authors: | Tanaka, M., Chu, F., Shimojo, M. |
| Source: | Journal of Materials Science; May 2006, Vol. 41 Issue 9, p2667-2671, 5p |
| Database: | Applied Science & Technology Source |
Be the first to leave a comment!
