Structure and properties of reactive direct current magnetron sputtered niobium aluminum nitride coatings.
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| Title: | Structure and properties of reactive direct current magnetron sputtered niobium aluminum nitride coatings. |
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| Authors: | Barshilia, Harish C., Deepthi, B., Rajam, K. S. |
| Source: | Journal of Materials Research; May 2008, Vol. 23 Issue 5, p1258-1268, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 08842914 |
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| DOI: | 10.1557/jmr.2008.0168 |
