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Structure and properties of reactive direct current magnetron sputtered niobium aluminum nitride coatings.

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Title: Structure and properties of reactive direct current magnetron sputtered niobium aluminum nitride coatings.
Authors: Barshilia, Harish C., Deepthi, B., Rajam, K. S.
Source: Journal of Materials Research; May 2008, Vol. 23 Issue 5, p1258-1268, 11p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501255287
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Structure and properties of reactive direct current magnetron sputtered niobium aluminum nitride coatings.
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501255287
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        Value: 10.1557/jmr.2008.0168
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      – Code: eng
        Text: English
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        PageCount: 11
        StartPage: 1258
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      – TitleFull: Structure and properties of reactive direct current magnetron sputtered niobium aluminum nitride coatings.
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            NameFull: Barshilia, Harish C.
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            NameFull: Deepthi, B.
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            NameFull: Rajam, K. S.
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              Text: May 2008
              Type: published
              Y: 2008
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