Direct epitaxial growth of semiconducting β-FeSi2 thin films on Si(111) by facing targets direct-current sputtering.
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| Title: | Direct epitaxial growth of semiconducting β-FeSi2 thin films on Si(111) by facing targets direct-current sputtering. |
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| Authors: | Yoshitake, T., Inokuchi, Y., Yuri, A. |
| Source: | Applied Physics Letters; May 1 2006, Vol. 88 Issue 18, p182104-182104, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.2200153 |
