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Gray-tone lithography using an optical diffuser and a contact aligner.

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Bibliographic Details
Title:	Gray-tone lithography using an optical diffuser and a contact aligner.
Authors:	Christophersen, Marc, Phlips, Bernard F.
Source:	Applied Physics Letters; May 12 2008, Vol. 92 Issue 19, p194102-194102, 1p
Database:	Applied Science & Technology Source

Description
ISSN:	00036951
DOI:	10.1063/1.2924314