Modeling self-annealing kinetics in electroplated Cu thin films.
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| Title: | Modeling self-annealing kinetics in electroplated Cu thin films. |
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| Authors: | Stangl, M., Militzer, M. |
| Source: | Journal of Applied Physics; June 1 2008, Vol. 103 Issue 11, p113521-113521, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.2937249 |
