Multidirectional UV Lithography for Complex 3-D MEMS Structures.
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| Title: | Multidirectional UV Lithography for Complex 3-D MEMS Structures. |
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| Authors: | Yoon, Yong-Kyu, Park, Jung-Hwan, Allen, Mark G. |
| Source: | Journal of Microelectromechanical Systems; October 2006, Vol. 15 Issue 5, p1121-1130, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2006.879669 |
