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Multidirectional UV Lithography for Complex 3-D MEMS Structures.

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Bibliographic Details
Title: Multidirectional UV Lithography for Complex 3-D MEMS Structures.
Authors: Yoon, Yong-Kyu, Park, Jung-Hwan, Allen, Mark G.
Source: Journal of Microelectromechanical Systems; October 2006, Vol. 15 Issue 5, p1121-1130, 10p
Database: Applied Science & Technology Source
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