Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications.
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| Title: | Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications. |
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| Authors: | Gupta, S., Williams, O. A., Patel, R. J. |
| Source: | Journal of Materials Research; December 2006, Vol. 21 Issue 12, p3037-3046, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 08842914 |
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| DOI: | 10.1557/jmr.2006.0372 |
