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Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications.

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Title: Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications.
Authors: Gupta, S., Williams, O. A., Patel, R. J.
Source: Journal of Materials Research; December 2006, Vol. 21 Issue 12, p3037-3046, 10p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501354698
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications.
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  Data: <searchLink fieldCode="AU" term="%22Gupta%2C+S%2E%22">Gupta, S.</searchLink><br /><searchLink fieldCode="AU" term="%22Williams%2C+O%2E+A%2E%22">Williams, O. A.</searchLink><br /><searchLink fieldCode="AU" term="%22Patel%2C+R%2E+J%2E%22">Patel, R. J.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Research%22">Journal of Materials Research</searchLink>; December 2006, Vol. 21 Issue 12, p3037-3046, 10p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501354698
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1557/jmr.2006.0372
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      – Code: eng
        Text: English
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        PageCount: 10
        StartPage: 3037
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      – TitleFull: Residual stress, intermolecular force, and frictional properties distribution maps of diamond films for micro- and nano-electromechanical (M/NEMS) applications.
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            NameFull: Gupta, S.
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            NameFull: Williams, O. A.
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              Text: December 2006
              Type: published
              Y: 2006
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              Value: 12
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