Study of HCl and Secco Defect Etching for Characterization of Thick sSOI.
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| Title: | Study of HCl and Secco Defect Etching for Characterization of Thick sSOI. |
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| Authors: | Abbadie, A., Bedell, S. W., Hartmann, J. M. |
| Source: | Journal of the Electrochemical Society; Aug2007, Vol. 154 Issue 8, pH713-H719, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2740032 |
