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Study of HCl and Secco Defect Etching for Characterization of Thick sSOI.

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Title: Study of HCl and Secco Defect Etching for Characterization of Thick sSOI.
Authors: Abbadie, A., Bedell, S. W., Hartmann, J. M.
Source: Journal of the Electrochemical Society; Aug2007, Vol. 154 Issue 8, pH713-H719, 7p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501373452
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Study of HCl and Secco Defect Etching for Characterization of Thick sSOI.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; Aug2007, Vol. 154 Issue 8, pH713-H719, 7p
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RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.2740032
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 7
        StartPage: H713
    Titles:
      – TitleFull: Study of HCl and Secco Defect Etching for Characterization of Thick sSOI.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Abbadie, A.
      – PersonEntity:
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            NameFull: Bedell, S. W.
      – PersonEntity:
          Name:
            NameFull: Hartmann, J. M.
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            – D: 01
              M: 08
              Text: Aug2007
              Type: published
              Y: 2007
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              Value: 00134651
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              Value: 154
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              Value: 8
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
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