Tensile-strained Si layers grown on Si0.6Ge0.4 and Si0.5Ge0.5 virtual substrates: I. Film thickness and morphology.

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Bibliographic Details
Title: Tensile-strained Si layers grown on Si0.6Ge0.4 and Si0.5Ge0.5 virtual substrates: I. Film thickness and morphology.
Authors: Hartmann, J. M., Abbadie, A., Guinche, Y.
Source: Semiconductor Science & Technology; April 2007, Vol. 22 Issue 4, p354-361, 8p
Database: Applied Science & Technology Source
Description
ISSN:02681242
DOI:10.1088/0268-1242/22/4/010