Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force Microscopy.
Saved in:
| Title: | Characterization of Probe Dynamic Behaviors in Critical Dimension Atomic Force Microscopy. |
|---|---|
| Authors: | Feng, Shaw C., Joung, Che Bong, Vorburger, Theodore V. |
| Source: | Journal of Research of the National Institute of Standards & Technology; July/August 2009, Vol. 114 Issue 4, p201-214, 14p |
| Database: | Applied Science & Technology Source |
|
Full text is not displayed to guests.
Login for full access.
|
|
| ISSN: | 1044677X |
|---|
