The effect of porogen on physical properties in MTMS-BTMSE spin-on organosilicates.

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Bibliographic Details
Title:	The effect of porogen on physical properties in MTMS-BTMSE spin-on organosilicates.
Authors:	Kim, B. R., Son, J. M., Ko, M. J.
Source:	Journal of Materials Science; Jul2007, Vol. 42 Issue 14, p5381-5390, 10p
Database:	Applied Science & Technology Source

Description
ISSN:	00222461
DOI:	10.1007/s10853-006-0886-x