Fabrication of Submicrometer InP Pillars by Colloidal Lithography and Dry Etching.
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| Title: | Fabrication of Submicrometer InP Pillars by Colloidal Lithography and Dry Etching. |
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| Authors: | Li, Ming-Yu, Naureen, Shagufta, Shahid, Naeem |
| Source: | Journal of the Electrochemical Society; 2010, Vol. 157 Issue 9, pH896-H899, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.3464764 |