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Fabrication of Submicrometer InP Pillars by Colloidal Lithography and Dry Etching.

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Bibliographic Details
Title: Fabrication of Submicrometer InP Pillars by Colloidal Lithography and Dry Etching.
Authors: Li, Ming-Yu, Naureen, Shagufta, Shahid, Naeem
Source: Journal of the Electrochemical Society; 2010, Vol. 157 Issue 9, pH896-H899, 4p
Database: Applied Science & Technology Source
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