A large bucket plasma source constructed of aluminium-alloy having a Forrester-Busnardo-Keller type dislocated cusp line magnet arrangement.
Saved in:
| Title: | A large bucket plasma source constructed of aluminium-alloy having a Forrester-Busnardo-Keller type dislocated cusp line magnet arrangement. |
|---|---|
| Authors: | Oka, Y., Kuroda, T., Kaneko, O. |
| Source: | Vacuum; 1989, Vol. 39 Issue 6, p565-569, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
|---|---|
| DOI: | 10.1016/0042-207X(89)90635-0 |
