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Mechanisms of silicon oxidation at low temperatures by microwave-excited O2 gas and O2-N2 mixed gas.

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Bibliographic Details
Title: Mechanisms of silicon oxidation at low temperatures by microwave-excited O2 gas and O2-N2 mixed gas.
Authors: Yasuda, Y., Zaima, S., Kaida, T.
Source: Journal of Applied Physics; March 1 1990, Vol. 67, p2603-2607, 5p
Database: Applied Science & Technology Source
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