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Selective chemically assisted ion beam etching of Si, polysilicon, and SiO2 using Ni-Cr masks and Cl2.

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Bibliographic Details
Title: Selective chemically assisted ion beam etching of Si, polysilicon, and SiO2 using Ni-Cr masks and Cl2.
Authors: Xiao, Zhaohua, Nilsson, B., Svedberg, P.
Source: Journal of the Electrochemical Society; May 1990, Vol. 137, p1579-1581, 3p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501748720
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Selective chemically assisted ion beam etching of Si, polysilicon, and SiO2 using Ni-Cr masks and Cl2.
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  Data: <searchLink fieldCode="AU" term="%22Xiao%2C+Zhaohua%22">Xiao, Zhaohua</searchLink><br /><searchLink fieldCode="AU" term="%22Nilsson%2C+B%2E%22">Nilsson, B.</searchLink><br /><searchLink fieldCode="AU" term="%22Svedberg%2C+P%2E%22">Svedberg, P.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; May 1990, Vol. 137, p1579-1581, 3p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501748720
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1149/1.2086730
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 3
        StartPage: 1579
    Titles:
      – TitleFull: Selective chemically assisted ion beam etching of Si, polysilicon, and SiO2 using Ni-Cr masks and Cl2.
        Type: main
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          Name:
            NameFull: Xiao, Zhaohua
      – PersonEntity:
          Name:
            NameFull: Nilsson, B.
      – PersonEntity:
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            NameFull: Svedberg, P.
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          Dates:
            – D: 01
              M: 05
              Text: May 1990
              Type: published
              Y: 1990
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              Value: 00134651
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            – Type: volume
              Value: 137
          Titles:
            – TitleFull: Journal of the Electrochemical Society
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