Thermally stable, low-leakage self-aligned titanium silicide junctions.
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| Title: | Thermally stable, low-leakage self-aligned titanium silicide junctions. |
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| Authors: | Yoshida, T., Ogawa, S., Okuda, S. |
| Source: | Journal of the Electrochemical Society; June 1990, Vol. 137, p1914-1917, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2086831 |
