APA (7th ed.) Citation

Yoshida, T., Ogawa, S., & Okuda, S. (1990). Thermally stable, low-leakage self-aligned titanium silicide junctions. Journal of the Electrochemical Society, 137, 1914. https://doi.org/10.1149/1.2086831

Chicago Style (17th ed.) Citation

Yoshida, T., S. Ogawa, and S. Okuda. "Thermally Stable, Low-leakage Self-aligned Titanium Silicide Junctions." Journal of the Electrochemical Society 137 (1990): 1914. https://doi.org/10.1149/1.2086831.

MLA (9th ed.) Citation

Yoshida, T., et al. "Thermally Stable, Low-leakage Self-aligned Titanium Silicide Junctions." Journal of the Electrochemical Society, vol. 137, 1990, p. 1914, https://doi.org/10.1149/1.2086831.