View in EDS

Thermally stable, low-leakage self-aligned titanium silicide junctions.

Saved in:
Bibliographic Details
Title: Thermally stable, low-leakage self-aligned titanium silicide junctions.
Authors: Yoshida, T., Ogawa, S., Okuda, S.
Source: Journal of the Electrochemical Society; June 1990, Vol. 137, p1914-1917, 4p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501757730
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Thermally stable, low-leakage self-aligned titanium silicide junctions.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Yoshida%2C+T%2E%22">Yoshida, T.</searchLink><br /><searchLink fieldCode="AU" term="%22Ogawa%2C+S%2E%22">Ogawa, S.</searchLink><br /><searchLink fieldCode="AU" term="%22Okuda%2C+S%2E%22">Okuda, S.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; June 1990, Vol. 137, p1914-1917, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501757730
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.2086831
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: 1914
    Titles:
      – TitleFull: Thermally stable, low-leakage self-aligned titanium silicide junctions.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Yoshida, T.
      – PersonEntity:
          Name:
            NameFull: Ogawa, S.
      – PersonEntity:
          Name:
            NameFull: Okuda, S.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 06
              Text: June 1990
              Type: published
              Y: 1990
          Identifiers:
            – Type: issn-print
              Value: 00134651
          Numbering:
            – Type: volume
              Value: 137
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
ResultId 1