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Thermally stable, low-leakage self-aligned titanium silicide junctions.

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Bibliographic Details
Title: Thermally stable, low-leakage self-aligned titanium silicide junctions.
Authors: Yoshida, T., Ogawa, S., Okuda, S.
Source: Journal of the Electrochemical Society; June 1990, Vol. 137, p1914-1917, 4p
Database: Applied Science & Technology Source
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