A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power.
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| Title: | A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power. |
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| Authors: | Kwon, D. C., Chang, W. S., Park, M. |
| Source: | Journal of Applied Physics; Apr2011, Vol. 109 Issue 7, p073311-1-073311-8, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.3572264 |
