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A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power.

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Title: A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power.
Authors: Kwon, D. C., Chang, W. S., Park, M.
Source: Journal of Applied Physics; Apr2011, Vol. 109 Issue 7, p073311-1-073311-8, 8p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501776641
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power.
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  Data: <searchLink fieldCode="AU" term="%22Kwon%2C+D%2E+C%2E%22">Kwon, D. C.</searchLink><br /><searchLink fieldCode="AU" term="%22Chang%2C+W%2E+S%2E%22">Chang, W. S.</searchLink><br /><searchLink fieldCode="AU" term="%22Park%2C+M%2E%22">Park, M.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; Apr2011, Vol. 109 Issue 7, p073311-1-073311-8, 8p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501776641
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1063/1.3572264
    Languages:
      – Code: eng
        Text: English
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        PageCount: 8
        StartPage: 073311-1
    Titles:
      – TitleFull: A self-consistent global model of solenoidal-type inductively coupled plasma discharges including the effects of radio-frequency bias power.
        Type: main
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            NameFull: Kwon, D. C.
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            NameFull: Chang, W. S.
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            NameFull: Park, M.
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            – D: 01
              M: 04
              Text: Apr2011
              Type: published
              Y: 2011
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              Value: 109
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              Value: 7
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            – TitleFull: Journal of Applied Physics
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