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Ionized clusters: a technique for low energy ion beam deposition.

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Title: Ionized clusters: a technique for low energy ion beam deposition.
Authors: Yamada, I., Takagi, T., Younger, P. R.
Source: Optical Engineering; February 1987, Vol. 26, p174-180, 7p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501842856
AccessLevel: 2
PubType: Academic Journal
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  Data: Ionized clusters: a technique for low energy ion beam deposition.
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      – Code: eng
        Text: English
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        PageCount: 7
        StartPage: 174
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      – TitleFull: Ionized clusters: a technique for low energy ion beam deposition.
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            NameFull: Yamada, I.
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            NameFull: Takagi, T.
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            NameFull: Younger, P. R.
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              Text: February 1987
              Type: published
              Y: 1987
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              Value: 26
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