A new design for a multitechnique ultrahigh vacuum surface analysis chamber with high pressure capabilities.

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Bibliographic Details
Title: A new design for a multitechnique ultrahigh vacuum surface analysis chamber with high pressure capabilities.
Authors: Campbell, R. A., Goodman, D. W.
Source: Review of Scientific Instruments; January 1992, Vol. 63 Issue 1, p172-174, 3p
Database: Applied Science & Technology Source
Description
ISSN:00346748
DOI:10.1063/1.1142951