Effect of gas phase on SiC and Si3N4 formations from SiO2.
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| Title: | Effect of gas phase on SiC and Si3N4 formations from SiO2. |
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| Authors: | Wada, H., Wang, L. |
| Source: | Journal of Materials Science; March 15 1992, Vol. 27, p1528-1536, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00222461 |
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| DOI: | 10.1007/BF00542914 |
