Effect of gas phase on SiC and Si3N4 formations from SiO2.

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Title: Effect of gas phase on SiC and Si3N4 formations from SiO2.
Authors: Wada, H., Wang, L.
Source: Journal of Materials Science; March 15 1992, Vol. 27, p1528-1536, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501992937
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Effect of gas phase on SiC and Si3N4 formations from SiO2.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Materials+Science%22">Journal of Materials Science</searchLink>; March 15 1992, Vol. 27, p1528-1536, 9p
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1007/BF00542914
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 9
        StartPage: 1528
    Titles:
      – TitleFull: Effect of gas phase on SiC and Si3N4 formations from SiO2.
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            NameFull: Wada, H.
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            NameFull: Wang, L.
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            – D: 15
              M: 03
              Text: March 15 1992
              Type: published
              Y: 1992
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              Value: 27
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            – TitleFull: Journal of Materials Science
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